Relying on microelectromechanical systems (MEMS) technology, CMUTs have been studied in a large number of acoustic applications, which can be divided into two subsets: air-coupled applications, where the device is operated within air or general gaseous environments, and immersion applications where the device is located in, or in contact with, a liquid. ![]() ![]() Capacitive micromachined ultrasonic transducers (CMUTs) are an attractive alternative to the traditional piezoelectric film-based transducers because of several advantages they may offer, such as larger bandwidth, increased sensitivity, efficient performance, IC-compatible fabrication and a variety of possible array configurations.
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